晶圆激光退火详解 - 知乎 - 知乎专栏
2023年8月16日 · 脉冲激光退火（PLA, Pulsed Laser Annealing） 使用短时间脉冲的激光器进行退火。 脉冲激光 意味着激光以短暂的脉冲形式发出，而不是连续的 波束 。由于脉冲的短暂性， …
In this work, we will compare junction performance and integratablity of fast-ramp spike, flash, SPER and laser annealing down to 45nm CMOS. The junction depth, abruptness and …
Why Laser Spike Annealing Is the Right Choice for the Digital ...
2022年8月2日 · Annealing is a thermal process used in the far front end of semiconductor device manufacturing to lower silicon resistance and activate dopants injected into crystalline layers …
(PDF) Laser spike annealing and its application to
2008年11月3日 · Laser spike annealing (LSA) is a disruptive technology which has been successfully demonstrated for advanced junction engineering—creating highly activated ultra …
2011年7月14日 · • For P, dopant deactivation occurs at very low T; reverse annealing starts ~650oC. • Original activation is fully recovered after second LSA Tem perature Profiles: LSA …
• S/D anneal: Higher activation, improved NMOS strain • High k anneal: Lower leakage, no de-activation • Ti Silicide: Low thermal budget, tight process control
Laser spike annealing for advanced CMOS devices - IEEE Xplore
In this paper, we will explore ways to expand the process window using sub-millisecond laser spike annealing. Focus will be placed on thermal budget reduction and its impact on wafer …
“Using genetic algorithm to optimize the dummy filling problem of the flash lamp anneal process in semiconductor manufacturing”, J. Intell. Man. (2012) Refs: D. James, AVS JTG Semicon West …
Laser spike annealing for advanced CMOS devices - ResearchGate
2008年6月15日 · In this paper, we will explore ways to expand the process window using sub-millisecond laser spike annealing. Focus will be placed on thermal budget reduction and its …
Laser spike annealing and its application to leading-edge logic …
Abstract: Laser spike annealing (LSA) is a disruptive technology which has been successfully demonstrated for advanced junction engineering—creating highly activated ultra-shallow …
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