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  1. 干法刻蚀之铝刻蚀 - 知乎 - 知乎专栏

  2. Dry-Etch Al etch Challenges-1 - 知乎 - 知乎专栏

  3. Metal干法刻蚀工艺介绍 - 百度文库

  4. Dry Etching of Al2O3 Thin Films in O2/BCl3/Ar ... - ResearchGate

  5. Atomic layer etching of Al2O3 using BCl3/Ar for the interface ...