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  1. 干法刻蚀之铝刻蚀 - 知乎 - 知乎专栏

  2. Dry-Etch Al etch Challenges-1 - 知乎 - 知乎专栏

  3. Al-Cu interconnect corrosion prevention in post metal etch

  4. Atomic layer etching of Al2O3 using BCl3/Ar for the interface ...

  5. Etching characteristics of Al2O3 thin films in ... - ScienceDirect