Electron beam deposition occurs at high vacuum (10-7 Torr). A focused beam of high-energy electrons is directed to a crucible containing the ultra-high purity source material (such as gold). The beam ...
Thin-film deposition is any technique for depositing a thin film of material onto a substrate. Most deposition techniques allow layer thickness to be controlled within a few tens of nanometers. On the ...
This system offers a unique capability in the combinatorial deposition of thin films and coatings for the rapid discovery of new material compositions. The system's ability to simultaneously deposit ...
Various thin-film deposition tools, including PVD (e-beam & thermal evaporators, DC & RF magnetron (reactive) sputterers) and CVD (APCVD of graphene, Si oxidation, PECVD of SiO2 and SiNx). Available ...
Thin film equipment is vacuum process equipment for the deposition or modification of thin films or surfaces using CVD, PVD, plasma etching, and thermal oxidation or ion implantation. Thin film ...
involves the deposition of liquid droplets onto a rotating substrate, enabling the coating of non-flat surfaces. These advanced techniques expand the capabilities of spin coating for specialized ...
Ongoing research is dedicated to overcoming these obstacles, with a focus on developing new materials, enhancing deposition techniques, and understanding the fundamental properties of thin films at ...